Movement of oxygen vacancies in oxide film during annealing observed by an optical reflectivity difference technique
Movement of oxygen vacancies in oxide film during annealing observed by an optical reflectivity difference technique
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DOI：
10.1063/1.2776375
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发表时间：
2007-09
影响因子：
3.2
通讯作者：
Xu Wang;K. Jin;Hubin Lu;Y. Fei;Xiangdong Zhu;Guo‐zhen Yang
中科院分区：
文献类型：
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作者：
Xu Wang;K. Jin;Hubin Lu;Y. Fei;Xiangdong Zhu;Guo‐zhen Yang
采用脉冲激光沉积法在SrTiO 3（100）衬底上制备了Nb掺杂的SrTiO 3薄膜。利用双入射光反射率差（OIRD）技术和反射式高能电子衍射技术对薄膜在真空和氧气环境中的生长和退火过程进行了真实的实时监测。在不同的退火环境中，薄膜产生不同的光学退火信号。从实验OIRD信号与模拟OIRD信号的比较，我们证明了光学技术可以很容易地告诉是否在退火过程中的氧空位进入或移出的薄膜。发现光信号由阶跃边缘和阶地的贡献组成。
The monolayer growth of Nb-doped SrTiO3 on SrTiO3 (100) substrate is prepared by a pulsed laser deposition method. The growth and annealing of the film in vacuum and in oxygen ambient are monitored in real time by an oblique-incidence optical reflectivity difference (OIRD) technique and reflection high-energy electron diffraction technique. The films annealed in different ambient result in different optical annealing signals. From the comparison of experimental OIRD signals with the simulation of OIRD signals, we prove that the optical technique can easily tell whether the oxygen vacancies are moving into or moving out of the film during the annealing. The optical signals are found to be composed of contributions from step edges and terraces.