Fabrication and electrorotation of a novel epoxy based micromotor working in uniform DC electric field

Fabrication and electrorotation of a novel epoxy based micromotor working in uniform DC electric field
复制标题

均匀直流电场下新型环氧树脂基微电机的制备及电旋转

DOI:
10.1088/0964-1726/24/10/105010
复制
发表时间:
2015
影响因子:
4.1
通讯作者:
M. Zrinyi
M. Zrinyi
中科院分区:
材料科学3区
文献类型:
--
作者:
R. A. Bauer;L. Kelemen;M. Nakano;A. Totsuka;M. Zrinyi

文献摘要

相似文献

首次对环氧基聚合物转子的电场诱导旋转进行了直接观测。制备了几个微米尺寸的聚合物盘、空心圆柱体和齿轮作为转子。研究了这些亚毫米级刀具在均匀直流电场作用下的电旋转行为。考察了形状、尺寸和厚度对其性能的影响。这种新型的环氧基微器件在均匀的直流电场中表现出强烈的旋转性。微米级聚合物转子的转速可以方便地通过电场强度在很大范围内(在300到3000 rpm之间)进行调节,这为它们在几种MEMS应用中的使用开辟了新的前景。
We have presented the first direct observation of electric field induced rotation of epoxy based polymer rotors. Polymer disks, hollow cylinders and gears were prepared in few micrometer dimensions as rotors. Electrorotation of these sub-millimeter sized tools was studied under uniform dc electric field. The effects of shape, size and thickness were investigated. The novel epoxy based micro devices show intensive spinning in a uniform dc electric field. The rotational speed of micron-sized polymer rotors can be conveniently tuned in a wide range (between 300 and 3000 rpm) by the electric field intensity, opening new perspectives for their use in several MEMS applications.