Fully programmable MEMS ciliary actuator arrays for micromanipulation tasks
Fully programmable MEMS ciliary actuator arrays for micromanipulation tasks
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用于微操作任务的完全可编程 MEMS 纤毛执行器阵列
DOI：
10.1109/robot.2000.844746
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发表时间：
2000
期刊：
影响因子：
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通讯作者：
G. Kovacs
中科院分区：
文献类型：
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作者：
John W. Suh;R. Darling;K. Böhringer;B. Donald;H. Baltes;G. Kovacs
提出了首个采用片上CMOS电路的微加工双晶片有机纤毛阵列。该装置由8/spl倍/8单元阵列组成，每个单元阵列具有四个正交定向致动器，总体模具尺寸为9.4 mm/spl倍/9.4 mm。基于聚酰亚胺的执行器是直接在选择和驱动电路上制作的。选择并激活该阵列中的执行器表明集成成功。CMOS电子和MEMS微机制的集成允许实现新的任务级微操作策略。新的低级控制算法（执行器步态）也进行了演示。该阵列可执行多种操作任务，包括线性平移、对角线运动以及矢量场操作，如挤压场和径向场定向和定心。初步实验还采用尺寸约为3mm /spl倍/ 3mm /spl倍/0.5 mm的薄硅片作为移动对象。
The first micromachined bimorph organic ciliary array with on-chip CMOS circuitry is presented. This device is composed of an 8/spl times/8 array of cells each having four orthogonally oriented actuators in on overall die-size of 9.4 mm/spl times/9.4 mm. The polyimide based actuators were fabricated directly above the selection and drive circuitry. Selection and activation of actuators in this array shows that integration was successful. The integration of CMOS electronics and MEMS micromechanisms allows the implementation of new task-level micromanipulation strategies. New low-level control algorithms (actuator gaits) were also demonstrated. The array was programmed to perform several kinds of manipulation tasks, including linear translation, diagonal motion, as well as vector field operations such as squeeze field and radial field orienting and centering. Preliminary experiments were also performed using thin silicon dice of about 3 mm/spl times/3 mm/spl times/0.5 mm size as the object being moved.