Reversible SMA actuator for micron sized robot

Reversible SMA actuator for micron sized robot
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用于微米级机器人的可逆 SMA 执行器

DOI：
10.1109/memsys.1990.110279
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发表时间：
1990
期刊：
IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
影响因子：
--
通讯作者：
S. Ogawa
S. Ogawa
中科院分区：
--
文献类型：
--
作者：
K. Kuribayashi;M. Yoshitake;S. Ogawa

文献摘要

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提出了一种基于可逆形状记忆合金的微米级机器人。分析了一个采用大尺寸RSMA的大型主动弯曲框架，推导了其齐次变换矩阵。一个SCARA机器人使用两个较大尺寸的RSMAs和电流控制。结果表明，用磁控溅射法和热处理法可以制备用于微米级机器人的可逆TiNi合金薄膜，10 μ m厚的可逆TiNi合金薄膜的频率响应约为5Hz。&lt;<ETX>&gt;
A micron-sized robot using reversible shape-memory alloys (RSMA) is proposed. A larger active bending frame using larger-sized RSMA is analyzed and its homogeneous transformation matrix is derived. A SCARA robot using two larger-sized RSMAs was made and controlled by electrical current. It is shown that thin film of reversible TiNi alloy for a micron-sized robot could be made by a magnetron sputtering method and by heat treatment methods, and that the frequency response of 10- mu m-thick thin film of reversible TiNi alloy is about 5 Hz.<<ETX>>