Akiko Kikkawa, Rui Morimoto, Akira Izumi, Hideki Matsumura: "Electrical properties of silicon nitride films deposited by catalytic chemical vapor deposition on catalytically nitrided Si(100)"Thin Solid Films. (掲載決定). (2003)

Akiko Kikkawa, Rui Morimoto, Akira Izumi, Hideki Matsumura: "Electrical properties of silicon nitride films deposited by catalytic chemical vapor deposition on catalytically nitrided Si(100)"Thin Solid Films. (掲載決定). (2003)
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Akiko Kikkawa、Rui Morimoto、Akira Izumi、Hideki Matsumura:“催化氮化 Si(100) 上催化化学气相沉积沉积的氮化硅薄膜的电性能”薄固体薄膜(2003 年出版)。

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