Role of Hydrogen in CVD Growth of Large Single Crystal Graphene

Role of Hydrogen in CVD Growth of Large Single Crystal Graphene
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DOI:
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发表时间:
2009
期刊:
影响因子:
17.1
通讯作者:
Murari Regmi;P. Fulvio;S. Dai;P. Datskos;G. Eres;I. Vlassiouk
Murari Regmi;P. Fulvio;S. Dai;P. Datskos;G. Eres;I. Vlassiouk
中科院分区:
材料科学1区
文献类型:
--
作者:
Murari Regmi;P. Fulvio;S. Dai;P. Datskos;G. Eres;I. Vlassiouk

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We show that graphene chemical vapor deposition growth on copper foil using methane as a carbon source is strongly affected by hydrogen, which appears to serve a dual role: an activator of the surface bound carbon that is necessary for monolayer growth and an etching reagent that controls the size and morphology of the graphene domains. The resulting growth rate for a fixed methane partial pressure has a maximum at hydrogen partial pressures 200400 times that of methane. The morphology and size of the graphene domains, as well as the number of layers, change with hydrogen pressure from irregularly shaped incomplete bilayers to well-defined perfect single layer hexagons. Raman spectra suggest the zigzag termination in the hexagons as more stable than the armchair edges.