Piezoelectric strain sensor through reverse replication based on two-photon polymerization
Piezoelectric strain sensor through reverse replication based on two-photon polymerization
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DOI：
10.1117/12.2630955
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发表时间：
2022-04
期刊：
影响因子：
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通讯作者：
Rishikesh Srinivasaraghavan Govindarajan;T. Stark;Stanislav Sikulskyi;F. Madiyar;Daewon Kim
中科院分区：
文献类型：
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作者：
Rishikesh Srinivasaraghavan Govindarajan;T. Stark;Stanislav Sikulskyi;F. Madiyar;Daewon Kim
聚合物基无机填料复合材料具有独特的性能和设计灵活性，在开发高性能压电传感器方面显示出巨大的潜力。本论文的目的是研究纳米颗粒对所开发复合材料的压电性能增强的影响。通过采用双光子聚合(2PP)方法印刷的带有IDT图案的IP-Q树脂制作的母模，反向复制PVDF-TrFE/BaTiO_3压电基板。IDT通道填充导电材料，表面多余的材料用氧等离子体刻蚀。用傅立叶变换红外光谱(FT-IR)和扫描电子显微镜(SEM)分析了基片的晶相特征和表面形貌。通过使用网络分析仪确定散射参数的变化来评估所开发的传感器的应变检测。
Polymer-based composite incorporated with inorganic filler has shown great potential for developing high-performance piezoelectric sensors as they offer unique properties and design flexibility. The aim of this paper is to investigate the impact of nanoparticles on the piezoelectric property enhancement of the developed composite. The piezoelectric substrate made of PVDF-TrFE/ BaTiO3 is replicated reversely through a master mold made of IP-Q resin with IDT design printed using a two-photon polymerization (2PP) method. IDT channels are filled with a conductive material, and excess material on the surface is etched using oxygen plasma. The crystalline phase characteristics and surface morphology of fabricated substrate are examined using Fourier transform infrared spectroscopy (FT-IR) and scanning electron microscope (SEM). Strain detection of the developed sensor is evaluated by determining the change in scattering parameter using a network analyzer.