Detection of nanomechanical vibrations by dynamic force microscopy in higher cantilever eigenmodes
Detection of nanomechanical vibrations by dynamic force microscopy in higher cantilever eigenmodes
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DOI：
10.1063/1.2767764
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发表时间：
2007-07-30
影响因子：
4
通讯作者：
Bokor, Jeffrey
中科院分区：
文献类型：
--
作者：
Paulo, Alvaro San;Black, Justin P.;Bokor, Jeffrey
作者提出了一种基于动态力显微镜的方法来表征谐振微纳机电系统中亚纳米尺度的机械振动。该方法同时利用显微镜悬臂的第一特征模进行形貌成像，利用第二特征模进行谐振腔振动检测。在这里，他们将该方案应用于1.6 GHz薄膜体声谐振器的表征，表明它克服了接触模式原子力显微镜声成像的主要局限性。该方法在任意高谐振频率系统上提供纳米级横向分辨率，这使得它适用于各种机电系统。(C) 2007年美国物理研究所。
The authors present a method based on dynamic force microscopy to characterize subnanometer-scale mechanical vibrations in resonant micro- and nanoelectromechanical systems. The method simultaneously employs the first eigenmode of the microscope cantilever for topography imaging and the second eigenmode for the detection of the resonator vibration. Here, they apply this scheme for the characterization of a 1.6 GHz film bulk acoustic resonator, showing that it overcomes the main limitations of acoustic imaging in contact-mode atomic force microscopy. The method provides nanometer-scale lateral resolution on arbitrarily high resonant frequency systems, which makes it applicable to a wide diversity of electromechanical systems. (C) 2007 American Institute of Physics.