Towards a deeper understanding of plastic deformation in mono-crystalline silicon
Towards a deeper understanding of plastic deformation in mono-crystalline silicon
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DOI：
10.1016/s0020-7403(01)00024-8
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发表时间：
2001-09
影响因子：
7.3
通讯作者：
Liangchi Zhang;I. Zarudi
中科院分区：
文献类型：
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作者：
Liangchi Zhang;I. Zarudi
本文研究了单晶硅在复杂加载条件下的塑性变形。借助于各种表征技术，人们发现硅的塑性机制是复杂的，取决于加载条件，涉及位错，相变和化学反应。一般来说，硅中的塑性变形是由所施加的应力场控制的机械变形、由外部加载环境确定的化学反应以及由加载类型和环境两者控制的机械-化学相互作用的耦合结果。温度升高加速了氧向硅中的渗透，降低了塑性屈服的临界应力。当化学作用被避免时，塑性的起始是通过八面体剪应力实现的，但塑性变形的进一步发展受到静水应力的影响。以相变形式的硅塑性，例如，从金刚石到非晶或从非晶到体心立方结构，由加载历史决定。
This paper investigates the plastic deformation in mono-crystalline silicon under complex loading conditions. With the aid of various characterization techniques, it was found that the mechanism of plasticity in silicon is complex and depends on loading conditions, involving dislocations, phase transformations and chemical reactions. In general, plastic deformation in silicon is the coupled result of mechanical deformation controlled by the stress field applied, chemical reaction determined by the external loading environment, and mechanical–chemical interaction governed by both the loading type and environment. Temperature rise accelerates the penetration of oxygen into silicon and reduces the critical stress of plastic yielding. When the chemical effect is avoided, the initiation of plasticity is enabled by octahedral shear stress but the further development of plastic deformation is influenced by hydrostatic stress. Plasticity of silicon in the form of phase transformations, e.g., from the diamond to amorphous or from the amorphous to bcc structures, is determined by loading history.