8.5 Homojunction GaN p-i-n Rectifiers with Ultra-low On-state Resistance

8.5 Homojunction GaN p-i-n Rectifiers with Ultra-low On-state Resistance
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发表时间:
2014
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通讯作者:
T. Kao;J. Kim;Y. Lee;M. Ji;T. Detchprohm;R. Dupuis;S. Shen
T. Kao;J. Kim;Y. Lee;M. Ji;T. Detchprohm;R. Dupuis;S. Shen
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作者:
T. Kao;J. Kim;Y. Lee;M. Ji;T. Detchprohm;R. Dupuis;S. Shen

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我们提出了在独立GaN (FS-GaN)或蓝宝石衬底上生长的同质结GaN p-i-n (PIN)整流器的比较研究。在蓝宝石上生长的PIN整流器显示击穿电压(VB)为600 V,特定导通电阻(RONA)为0.66 mΩ-cm 2。另一方面,在FS-GaN衬底上生长的PIN整流器在VB> 800 V和RONA = 0.28 mΩ-cm 2时表现出实质性的改善。相应的Baliga优良系数(VB 2 / RONA)达到了>2.5 GW/ cm2。器件性能遵循GaN开关的相同趋势,并展示了迄今为止报道的800 v二极管开关的最低导通电阻。
We present a comparative study of homojunction GaN p-i-n (PIN) rectifiers grown on either free-standing GaN (FS-GaN) or sapphire substrate. The PIN rectifier grown on sapphire shows the breakdown voltage (VB) of 600 V and a specific on-resistance (RONA) of 0.66 mΩ-cm 2 . On the other hand, a PIN rectifier grown on a FS-GaN substrate shows substantial improvement with VB> 800 V and RONA = 0.28 mΩ-cm 2 . The corresponding Baliga’s Figure of Merit (VB 2 / RONA) of >2.5 GW/cm 2 is achieved. The device performance follows the same trend for GaN switches and demonstrated the lowest on-resistance for 800-V diode switches reported to date.