System-level characterization of bias noise effects on electrostatic RF MEMS tunable filters

System-level characterization of bias noise effects on electrostatic RF MEMS tunable filters
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偏置噪声对静电 RF MEMS 可调谐滤波器影响的系统级表征

DOI:
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发表时间:
2011
期刊:
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems
影响因子:
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通讯作者:
D. Peroulis
D. Peroulis
中科院分区:
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文献类型:
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作者:
X. Liu;Kenle Chen;L. Katehi;W. Chappell;D. Peroulis

文献摘要

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本文首次对偏置噪声对高Q静电RF MEMS可调谐滤波器性能的影响进行了系统级表征。通过考察这种可调谐滤波器的系统级性能,本文表明,如果不能很好地控制,偏置噪声会降低可调谐滤波器的射频性能。通过误差向量幅值测量来量化,发现由偏置噪声引起的这种系统电平降级依赖于噪声信号的频率和幅度。
This paper presents the first system-level characterization of the effects of bias noise on the performance of high-Q electrostatic RF MEMS tunable filters. By looking at the system-level performance of such a tunable filter, this paper shows that bias noise, if not well controlled, can degrade the RF performance of the tunable filter. Quantified by error vector magnitude measurement, such system level degradation due to bias noise is found to be dependent on the frequency and amplitude of the noise signals.