System-level characterization of bias noise effects on electrostatic RF MEMS tunable filters
System-level characterization of bias noise effects on electrostatic RF MEMS tunable filters
复制标题
偏置噪声对静电 RF MEMS 可调谐滤波器影响的系统级表征
DOI:
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发表时间:
2011
期刊:
影响因子:
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通讯作者:
D. Peroulis
中科院分区:
文献类型:
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作者:
X. Liu;Kenle Chen;L. Katehi;W. Chappell;D. Peroulis
This paper presents the first system-level characterization of the effects of bias noise on the performance of high-Q electrostatic RF MEMS tunable filters. By looking at the system-level performance of such a tunable filter, this paper shows that bias noise, if not well controlled, can degrade the RF performance of the tunable filter. Quantified by error vector magnitude measurement, such system level degradation due to bias noise is found to be dependent on the frequency and amplitude of the noise signals.