Utilizing upper hybrid resonance for high density plasma production and negative ion generation in a downstream region
Utilizing upper hybrid resonance for high density plasma production and negative ion generation in a downstream region
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利用上部混合共振在下游区域产生高密度等离子体和负离子
DOI：
10.1063/1.4752868
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发表时间：
2012
影响因子：
3.2
通讯作者：
S. Bhattacharjee
中科院分区：
文献类型：
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作者：
D. Sahu;S. Bhattacharjee
局部波诱导共振是由微波以k⊥B模式直接发射到多usp （MC）等离子体器件中产生的，其中k是波矢量，B是静态磁场。共振区被确定为上部混合共振（UHR），位于距离MC边界r = ~ 22 mm处。径向波电场强度的测量证实了位于UHR区附近的波的右手截止点（r = 22.5-32.1 mm）。共振区对应的电子温度从r = 0时远离共振的值急剧上升~ 13 eV，有利于氢分子的产生。横向磁过滤器允许冷电子（~ 1-2 eV）进入下游区域，在那里它们通过解离附着产生负离子。电子能量分布函数（EEDF）的测量结果支持这一观点。在2.0 mTorr压力下，波功率密度为~ 3 W/cm2时，H -电流密度为~ 0.26 mA/cm2。
Localized wave-induced resonances are created by microwaves launched directly into a multicusp (MC) plasma device in the k ⊥ B mode, where k is the wave vector and B is the static magnetic field. The resonance zone is identified as upper hybrid resonance (UHR), and lies r = ∼22 mm away from the MC boundary. Measurement of radial wave electric field intensity confirms the right hand cutoff of the wave (r = 22.5–32.1 mm) located near the UHR zone. A sharp rise in the corresponding electron temperature in the resonance region by ∼13 eV from its value away from resonance at r = 0, is favorable for the generation of vibrationally excited molecules of hydrogen. A transverse magnetic filter allows cold electrons (∼1–2 eV) to pass into the downstream region where they generate negative ions by dissociative attachment. Measurements of electron energy distribution function (EEDF) support the viewpoint. H− current density of ∼0.26 mA/cm2 is obtained at a wave power density of ∼3 W/cm2 at 2.0 mTorr pressure, which ag...