Mechanical epitaxial lift off of GaAs epitaxial layers by using cleavage of In2Se3 layered structures
Mechanical epitaxial lift off of GaAs epitaxial layers by using cleavage of In2Se3 layered structures
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利用 In2Se3 层状结构的解理对 GaAs 外延层进行机械外延剥离
DOI:
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发表时间:
2018
期刊:
影响因子:
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通讯作者:
Masafumi Yamaguchi
中科院分区:
文献类型:
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作者:
Yu-Cian Wang;Nobuaki Kojima;Kei Kawakatsu;Akio Yamamoto;Yoshio Ohshita;Masafumi Yamaguchi