Behaviour of carbon stripper foils prepared by a mixed ion beam sputtering method
Behaviour of carbon stripper foils prepared by a mixed ion beam sputtering method
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混合离子束溅射法制备碳剥离箔的行为
DOI:
10.1016/0168-583x(95)00608-7
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发表时间:
1995
影响因子:
1.3
通讯作者:
T. Hattori
中科院分区:
文献类型:
--
作者:
H. Muto;M. Oyaizu;K. Kawasaki;Yohsuke Takahashi;K. Takeuchi;I. Sugai;T. Hattori