Enhancing Power Density through Electrode Configuration for Piezomems Energy Harvester
Enhancing Power Density through Electrode Configuration for Piezomems Energy Harvester
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DOI：
10.1109/mems58180.2024.10439404
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发表时间：
2024-01
期刊：
影响因子：
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通讯作者：
Ranjith D. Janardhana;Sean Smith;N. Montross;Joe Evans;Nathan Jackson
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文献类型：
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作者：
Ranjith D. Janardhana;Sean Smith;N. Montross;Joe Evans;Nathan Jackson
在过去的十年中，微机电系统（MEMS）能量采集器得到了广泛的研究，但在高加速度和低频率下增加功率密度和长期可靠性仍然是主要问题。本研究的重点是开发一种基于锆钛酸铅（PZT）的低频能量采集器，该能量采集器能够在>4 g的高加速度下工作，具有高功率密度性能。本研究探讨改变电极配置和极化配置，以最大限度地提高功率密度的性能影响。该研究使用四种不同类型的电极配置，包括长和短的叉指电极（IDE）在d33模式下工作，和传统的平行板配置在d31模式下工作。结果进行了数值和实验验证。结果表明，d33模结构能够产生大于3200 μW mm-3的输出，可靠性高达4g。
Microelectromechanical Systems (MEMS) energy harvesters have been extensively investigated over the past decade, but increasing power density and long-term reliability under high acceleration and low frequency are still major concerns. This study focused on the development of a low-frequency lead zirconate titanate (PZT) based energy harvester capable of operating at high acceleration >4 g with high power density performance. This study investigates the performance effects of altering the electrode configuration and poling configuration to maximize power density. The study investigated using four different types of electrode configuration consisting of long and short interdigitated electrodes (IDE) to operate in d33 mode, and traditional parallel plate configuration to operate in d31 mode. The results were numerically and experimentally validated. The results illustrate that the d33 mode configuration was able to generate >3200 μW mm-3 with good reliability of up to 4 g.