Fabrication of Cu-Zr-Ti thick film metallic glass structure by double metal mask lift-off process
Fabrication of Cu-Zr-Ti thick film metallic glass structure by double metal mask lift-off process
复制标题
双金属掩模剥离工艺制备Cu-Zr-Ti厚膜金属玻璃结构
DOI:
10.1016/j.mee.2015.02.041
复制
发表时间:
2015
影响因子:
2.3
通讯作者:
S. Hata
中科院分区:
文献类型:
--
作者:
Shigetaka Watanabe;J. Sakurai;S. Hata
DOI:
--
发表时间:
2003
期刊:
Jpn. J. Appl. Phys 42
影响因子:
--
作者:
Yoshisato YOKOYAMA;Takashi FUKUSHIGE;Seiichi HATA;Kazuya MASU;Akira SHIMOKOHBE
通讯作者:
Akira SHIMOKOHBE