Characterization studies of two novel active pixel sensors
Characterization studies of two novel active pixel sensors
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DOI：
10.1117/1.2818224
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发表时间：
2007-12-01
影响因子：
1.3
通讯作者：
O'Shea, Val
中科院分区：
文献类型：
--
作者：
Bohndiek, Sarah E.;Arvanitis, Costas D.;O'Shea, Val
成立了一个英国财团（MI 3），以开发用于科学应用的先进CMOS图像传感器。“香草”，一个520 × 520阵列的有源像素与25 μ m的间距是在0.35 μ m的4 M2 P（4金属，2多晶硅）CMOS工艺制造，并使用3.3 V电源。它具有刷新复位电路，可实现低复位噪声和随机像素访问，以实现高速感兴趣区域（ROI）读出。“OPIC”是一种64 x 72测试结构的数字像素阵列，间距为30 μ m，采用0.25 μ m 5 M1 P（5金属1多晶硅）CMOS工艺制造，电源电压为3.3/2.5 V。它可以通过像素内比较器执行阈值处理，以高帧速率进行稀疏读出。在光学照明和X射线曝光下对两种传感器进行表征。对于X射线表征，两个传感器通过光纤板耦合到结构化的掺铊碘化铯（Csl：TI）闪烁体。Vanilla在500 nm处显示出34 +/- 3e（-）读取噪声和225 +/- 5 mA/W的光谱响应，并且可以以24，395帧/秒的速度读取6 x 6 ROI。OPIC具有46 +/- 3e（-）读取噪声，可以以高达3700帧/秒的速度执行稀疏读出。基于这些结果，Vanilla可以用于只有一小部分图像包含相关信息的应用，而OPIC适合于高速成像应用。(c)2007年，由光学仪器工程师协会（Society of Photo-Optical Instrumentation Engineers）主办。
A United Kingdom consortium (MI3) is founded to develop advanced CMOS image sensors for scientific applications. "Vanilla," a 520 x 520 array of active pixels with 25-mu m pitch is fabricated in the 0.35-mu m 4M2P (4 metal, 2 poly) CMOS process and uses a 3.3-V supply. It has flushed reset circuitry to attain low reset noise and random pixel access for high-speed region-of-interest (ROI) readout. "OPIC" is a 64 x 72 test structure array of digital pixels with 30-mu m pitch, fabricated in 0.25-mu m 5M1P (5 metal 1 poly) CMOS process with a 3.3/2.5-V supply. It can perform thresholding via an in-pixel comparator for sparse readout at a high frame rate. Characterization of both sensors is performed under optical illumination and x-ray exposure. For x-ray characterization, both sensors were coupled to a structured thallium-doped cesium iodide (Csl : TI) scintillator via a fiber optic plate. Vanilla has been found to exhibit 34 +/- 3e(-) read noise and a spectral response of 225 +/- 5 mA/W at 500 nm and can read a 6 x 6 ROI at 24,395 frames/s. OPIC has 46 +/- 3e(-) read noise and can perform sparse readout at up to 3700 frames/s. Based on these results, Vanilla could be employed for applications where only a small portion of the image contains relevant information, while OPIC is suited to high-speed imaging applications. (c) 2007 Society of Photo-Optical Instrumentation Engineers.