Vibration insensitive interferometry
Vibration insensitive interferometry
复制标题
振动不敏感干涉测量
DOI：
10.1117/12.2308094
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
J. Wyant
中科院分区：
文献类型：
--
作者：
J. Millerd;N. Brock;John B. Hayes;Brad Kimbrough;Michael B. North;J. Wyant
用于光学测试的相移干涉测量法的最大限制是对环境的敏感性，包括振动和空气湍流。使用时间相移的干涉仪对振动非常敏感，因为在不同的时间获取干涉数据的各种相移帧，并且振动导致数据帧之间的相移不同于期望的相移。振动效应可以通过同时获取所有相移帧来减少，并且湍流效应可以通过平均许多测量来减少。有几种技术可以同时获得多个相移干涉图，本文将讨论两种这样的技术：1）在单个探测器阵列上的同时相移干涉术（PhaseCam）和2）微偏振器相移阵列。这些技术的应用，用于测试的大型光学元件，振动模式的测量，分段的光学元件的定相，和测量的大型扩散结构的变形进行了说明。
The largest limitation of phase-shifting interferometry for optical testing is the sensitivity to the environment, both vibration and air turbulence. An interferometer using temporal phase-shifting is very sensitive to vibration because the various phase shifted frames of interferometric data are taken at different times and vibration causes the phase shifts between the data frames to be different from what is desired. Vibration effects can be reduced by taking all the phase shifted frames simultaneously and turbulence effects can be reduced by averaging many measurements. There are several techniques for simultaneously obtaining several phase-shifted interferograms and this paper will discuss two such techniques: 1) Simultaneous phase-shifting interferometry on a single detector array (PhaseCam) and 2) Micropolarizer phase-shifting array. The application of these techniques for the testing of large optical components, measurement of vibrational modes, the phasing of segmented optical components, and the measurement of deformations of large diffuse structures is described.