A 'fitness-wheel-shaped' MEMS vector hydrophone for 3D spatial acoustic orientation
A 'fitness-wheel-shaped' MEMS vector hydrophone for 3D spatial acoustic orientation
复制标题
用于 3D 空间声学定向的“健身轮形”MEMS 矢量水听器
DOI：
10.1088/1361-6439/aa5f31
复制
发表时间：
2017-04-01
影响因子：
2.3
通讯作者：
Zhang, Binzhen
中科院分区：
文献类型：
--
作者：
Wang, Renxin;Liu, Yuan;Zhang, Binzhen
为了获得精确的水下3D空间定向，开发了一种“健身轮形”MEMS矢量水听器（FWVH），它通过适当的结构设计和应变读数实现对三轴声压差的监测。与之前报道的T型结构组合矢量水听器（TSVH）输出与外力之间存在非线性关系相比，利用FWVH原则上可以实现三轴匹配，这使其在精确声学定向方面具有广阔的前景。开发了灵敏度的理论模型，其中考虑了扭矩以匹配模拟和实际结果。优于3D力传感器，FWVH以带宽为关键指标，在灵敏度的折衷下进行了细致的设计。考虑到带宽，确定了检测20-300Hz范围内的信号的参数。振动测试展示了三轴共振频率。最后，FWVH的频率响应曲线显示三轴灵敏度一致，与分析和仿真结果一致，在300 Hz时达到- 174 dB（0 dB指1 V mu Pa-1）。
For the purpose of acquiring precise underwater 3D spatial orientation, a 'fitness-wheel-shaped' MEMS vector hydrophone (FWVH) is developed, which achieves monitoring of a tri-axial acoustic pressure differential via appropriate constructional design and strain readout. Compared to the previously reported T-structure-combined vector hydrophone (TSVH) which has a nonlinear relationship between output and external force, using the FWVH it is feasible in principle to achieve a tri-axial match, which make it promising in accurate acoustic orientation. A theoretic model for sensitivity is developed, where torque moment is taken into consideration to match the simulation and practical results. Superior to 3D force sensors, bandwidth is taken as the key index for the FWVH and is designed in detail with a compromise of sensitivity. In view of the bandwidth, the parameters are determined for detecting the signal in the range 20-300 Hz. A vibration test demonstrates tri-axial resonance frequencies. Finally, the frequency response curve of the FWVH shows that tri-axial sensitivities are consistent, agreeing with the analysis and simulation results, which reach - 174 dB ( 0 dB referring to 1 V mu Pa-1) at 300 Hz.