Templateless prototyping of polydimethylsiloxane microfluidic structures using a pulsed CO2 laser
Templateless prototyping of polydimethylsiloxane microfluidic structures using a pulsed CO2 laser
复制标题
DOI：
10.1088/0960-1317/19/3/037002
复制
发表时间：
2009-03-01
影响因子：
2.3
通讯作者：
Gong, Hai-Qing
中科院分区：
文献类型：
--
作者：
Liu, Hao-Bing;Gong, Hai-Qing
我们提出了一种新的过程（通过切割和图案转移过程）快速原型的聚二甲基硅氧烷（PDMS）的微流体结构，而无需复制模板，使用CO2激光。该过程通常需要不到30分钟的时间来制造PDMS微流体芯片从想法到设备。除了节省时间外，该工艺还通过消除模板制作过程中所需的掩模、模板、晶圆制造设备和耗材的使用，大幅降低了设备和运营成本。我们进一步证明了该过程的能力，在快速成型的各种微观结构从2 μ m的薄层高达3.6毫米高的结构上的一个单一的PDMS层，具有精确的厚度控制以及光滑的顶部和底部表面。PDMS激光成型工艺的各种工艺特点和挑战在本说明中得到解决。
We present a novel process (through cutting and pattern transfer processes) for rapidly prototyping polydimethylsiloxane (PDMS) microfluidic structures without a replication template using a CO2 laser. The process typically takes less than 30 min to make a PDMS microfluidic chip from idea to device. In addition to time saving, the process also drastically cuts down equipment and operating costs by eliminating the use of masks, templates, wafer fabrication equipment and consumables needed in the template-making process. We further demonstrate the capability of the process in the rapid prototyping of a variety of microstructures from a 2 mu m thin layer up to a 3.6 mm high structure on a single PDMS layer with accurate thickness control as well as smooth top and bottom surfaces. Various process characteristics and challenges for the PDMS laser prototyping process are addressed in this note.