Analysis on the tunable optical properties of MOEMS filter based on Fabry–Perot Cavity
Analysis on the tunable optical properties of MOEMS filter based on Fabry–Perot Cavity
复制标题
基于法布里-珀罗腔的MOEMS滤波器可调谐光学特性分析
DOI：
10.1016/j.optcom.2004.05.015
复制
发表时间：
2004
影响因子：
2.4
通讯作者：
Guo Peifu
中科院分区：
文献类型：
--
作者：
Wei;Xiang;Bi;Zhu Yong;Liu Xu;Guo Peifu
发现了低干涉阶可调谐Fabry-Perot MEMS滤波器上下反射面反射的相移对谐振波长的确定起着至关重要的作用。通常用来描述调优过程的简单公式Δλ=2Δ(nd)/k证明是不准确的。利用传递矩阵法，导出了介质反射器中心波长附近相移的解析表达式。根据谐振条件，提出了气隙与谐振波长之间的新的线性关系。分析了反射镜的特性对可调灵敏度的影响。在一定波长范围内对线性关系的误差进行了估计。所得结果适用于所有法布里-珀罗型光学可调谐滤波器。
The phase shift on reflection from upper and bottom reflectors of the low interference order tunable Fabry–Perot MEMS filter was found playing a crucial role in the determination of resonant wavelength. The simple formula Δλ=2Δ(nd)/k, which was commonly used to describe the tuning process, was demonstrated not to be accurate. By using the transfer matrix method, the analytic expression for phase shift near the central wavelength of dielectric reflector was derived. The new linear relationship between the air gap and resonant wavelength was presented based on the resonant condition. The properties of mirrors that influence the tunable sensitivity were analyzed. Error of the linear relationship in a specified wavelength range was also estimated in this paper. The results are valid for all Fabry–Perot type optical tunable filters.