Efficient fabrication method of nano-grating for 3D holographic display with full parallax views.
Efficient fabrication method of nano-grating for 3D holographic display with full parallax views.
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DOI：
10.1364/oe.24.006203
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发表时间：
2016-03
期刊：
影响因子：
3.8
通讯作者：
Wenqiang Wan;Wen Qiao;Wenbin Huang;Ming Zhu;Zongbao Fang;D. Pu;Y. Ye;Yan-Hua Liu;Linsen Chen-Lins
中科院分区：
文献类型：
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作者：
Wenqiang Wan;Wen Qiao;Wenbin Huang;Ming Zhu;Zongbao Fang;D. Pu;Y. Ye;Yan-Hua Liu;Linsen Chen-Lins
基于衍射光学的多视图3D显示器无需任何特殊眼镜，即可在超宽视角下呈现高分辨率、全视差的3D图像。使能光学部件，即相位板，可以通过仔细设计每个纳米光栅像素的取向和周期来产生任意分布的视区。然而，这种3D显示屏由于在相位板上的纳米光栅的耗时的制造过程而被限制到有限的尺寸。在本论文中，我们提出并发展了一套可有效制作相位板的微影系统。在这里，我们以20 mm 2/min的速度制作了两个具有全纳米光栅像素覆盖的相位板，与电子束光刻方法相比，效率提高了500倍。一个2.5英寸的相位板产生9视图的3D图像与水平视差，而另一个6英寸的相位板产生64视图的3D图像与全视差。水平轴和垂直轴的角发散度分别为1.5度和1.25度，略大于时域有限差分（FDTD）模拟值1.2度。强度变化小于10%的每个视点，与模拟结果一致。在每个相位板的顶部，包含所有观察区的振幅信息的高分辨率二元掩模图案被很好地对准。我们实现了400像素/英寸的分辨率和40度视角的9视图3D图像与水平视差。在另一个原型中，每个视图的分辨率为160像素/英寸，对于具有全视差的64视图3D图像，视角为50度。实验表明，国产光刻系统为多视点三维全息显示提供了关键的制作技术。
Without any special glasses, multiview 3D displays based on the diffractive optics can present high resolution, full-parallax 3D images in an ultra-wide viewing angle. The enabling optical component, namely the phase plate, can produce arbitrarily distributed view zones by carefully designing the orientation and the period of each nano-grating pixel. However, such 3D display screen is restricted to a limited size due to the time-consuming fabricating process of nano-gratings on the phase plate. In this paper, we proposed and developed a lithography system that can fabricate the phase plate efficiently. Here we made two phase plates with full nano-grating pixel coverage at a speed of 20 mm2/mins, a 500 fold increment in the efficiency when compared to the method of E-beam lithography. One 2.5-inch phase plate generated 9-view 3D images with horizontal-parallax, while the other 6-inch phase plate produced 64-view 3D images with full-parallax. The angular divergence in horizontal axis and vertical axis was 1.5 degrees, and 1.25 degrees, respectively, slightly larger than the simulated value of 1.2 degrees by Finite Difference Time Domain (FDTD). The intensity variation was less than 10% for each viewpoint, in consistency with the simulation results. On top of each phase plate, a high-resolution binary masking pattern containing amplitude information of all viewing zone was well aligned. We achieved a resolution of 400 pixels/inch and a viewing angle of 40 degrees for 9-view 3D images with horizontal parallax. In another prototype, the resolution of each view was 160 pixels/inch and the view angle was 50 degrees for 64-view 3D images with full parallax. As demonstrated in the experiments, the homemade lithography system provided the key fabricating technology for multiview 3D holographic display.