Design and Fabrication of Suspended Indium Phosphide Waveguides for MEMS-Actuated Optical Buffering
Design and Fabrication of Suspended Indium Phosphide Waveguides for MEMS-Actuated Optical Buffering
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DOI：
10.1109/jstqe.2014.2384514
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发表时间：
2015-07-01
影响因子：
4.9
通讯作者：
Kenyon, Anthony J.
中科院分区：
文献类型：
--
作者：
Ng, Wing H.;Podoliak, Nina;Kenyon, Anthony J.
本文提出了一种基于磷化铟平台的悬浮式光波导的设计和制造方法，用于MEMS驱动的光缓冲器件，该器件可以通过静电驱动改变波导间距来实现光延迟。对波导和支柱支架的光学和力学性能进行了建模，并对不同的MEMS驱动方案进行了仿真。我们还展示了外延生长样品结构和悬浮波导器件的制造和表征结果，展示了两个平行的亚微米尺寸的波导，由400 nm的气隙分隔，并以40 μ m的间隔由s形支架悬浮。
We present the design and fabrication of suspended optical waveguides on indium phosphide platform for use in an optical buffer device with MEMS actuation, in which the optical delay can be achieved by changing the spacing of the waveguides by electrostatic actuation. The optical and mechanical properties of the waveguides and pillar supports are modeled, and different MEMS actuation schemes are simulated. We also present fabrication and characterization results of the epitaxially grown sample structure and of the suspended waveguide device, exhibiting two parallel waveguides with submicron dimensions separated by a 400-nm air gap, and suspended at 40-mu m intervals by S-shaped supports.