Influence of astigmatism on the fabrication of diffractive structures by use of focused ion-beam milling.
Influence of astigmatism on the fabrication of diffractive structures by use of focused ion-beam milling.
复制标题
DOI：
10.1364/opex.12.003954
复制
发表时间：
2004-08
期刊：
影响因子：
3.8
通讯作者：
Yongqi Fu;N. Bryan
中科院分区：
文献类型：
--
作者：
Yongqi Fu;N. Bryan
聚焦离子束(FIB)系统中存在像散，导致束斑形状由法线圆形变为椭圆形。这种变化影响了通过使用可编程控制的FIB的磨削来制造衍射结构。结合闪耀光栅和菲涅耳衍射透镜的制作进行了分析。详细讨论了椭圆长轴(A)与X轴一致、(B)与Y轴一致、(C)与X轴成45度、(D)与X轴成-45度四种情况下，有像散的光束光斑引起的制造误差。最后，给出了一种校正像散的方法和如何定性地确定光束光斑圆度的方法。
Astigmatism exists in a focused-ion-beam (FIB) system and causes the shape of a beam spot to change from a normal circle to an ellipse. This variation influences the fabrication of diffractive structures ?by use of programmable controlled milling of a FIB. It is analyzed combined with the fabrication of blazed gratings and Fresnel diffractive lenses. Fabrication errors caused by a beam spot with astigmatism is discussed in detail for four cases of the long axis of an ellipse (a) in accordance with the X axis, (b) in accordance with the Y axis, (c) at 45 masculine with the X axis, and (d) at -45 masculine with the X axis. Finally, a method is given for correction of the astigmatism and how to determine the circularity of the beam spot qualitatively.