Float polishing of optical materials.

Float polishing of optical materials.
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DOI:
10.1364/ao.26.000696
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发表时间:
1987-02
期刊:
影响因子:
1.9
通讯作者:
J. Bennett;J. J. Shaffer-J.;Y. Shibano;Y. Namba
J. Bennett;J. J. Shaffer-J.;Y. Shibano;Y. Namba
中科院分区:
工程技术4区
文献类型:
--
作者:
J. Bennett;J. J. Shaffer-J.;Y. Shibano;Y. Namba

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研究了浮子抛光技术,以确定其在光学材料上产生超光滑表面的适用性,产生<2 a rms的粗糙度。尝试抛光六种不同的材料,包括熔融石英,Zerodur和蓝宝石。熔融石英、Zerodur和康宁实验玻璃陶瓷材料的表面粗糙度较低,而o型切割单晶蓝宝石的表面粗糙度<1 a rms。据推测,在cerit和ULE石英上也可以获得类似的表面光洁度,由于样品安装和机器配置之间的不匹配,在这组实验中不能得到令人满意的抛光。
The float-polishing technique has been studied to determine its suitability for producing supersmooth surfaces on optical materials, yielding a roughness of <2 A rms. An attempt was made to polish six different materials including fused quartz, Zerodur, and sapphire. The low surface roughness was achieved on fused quartz, Zerodur, and Corning experimental glass-ceramic materials, and a surface roughness of <1 A rms was obtained on O-cut single-crystal sapphire. Presumably, similar surface finishes can also be obtained on CerVit and ULE quartz, which could not be polished satisfactorily in this set of experiments because of a mismatch between sample mounting and machine configuration.