Characterization of embedded membrane in corrugated silicon microphones for high-frequency resonance applications
Characterization of embedded membrane in corrugated silicon microphones for high-frequency resonance applications
复制标题
用于高频谐振应用的波纹硅麦克风中嵌入薄膜的表征
DOI：
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发表时间：
2019
影响因子：
1.1
通讯作者：
P. Ooi
中科院分区：
文献类型：
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作者：
Rahmat Zaki Auliya;M. R. Buyong;B. Majlis;M. R. Wee;P. Ooi
目的
本文的目的是提出一种替代方法，以提高微机电系统（MEMS）硅（Si）电容麦克风的工作频率和灵敏度方面的性能，通过在波纹膜的机械性能的对比度的第二材料的引入。
设计/方法/方式
采用COMSOL有限元法分析了由固体力学、静电和热粘性声学界面组成的MEMS麦克风的性能。因此，模拟结果可以描述MEMS麦克风的物理机制，特别是在麦克风具有复杂的几何形状的情况下。为了简化计算，采用了二维模型，并利用轴对称条件。
结果
仿真结果表明，麦克风的工作频率范围可以扩展到在可听频率范围内工作超过20 kHz。数据显示，使用SiC作为嵌入膜的波纹状Si膜的麦克风的频率谐振与平面Si膜的63 kHz相比增加到70 kHz，而麦克风的灵敏度从-76 dB略微降低到-79。此外，通过嵌入SiC材料，波纹膜麦克风的频率谐振可以从26 kHz提高到70 kHz。最后，通过调节埋置材料的高度，可以改变传声器的灵敏度和频率谐振值。
独创性/价值
基于这些理论结果，所提出的修改突出了频率和灵敏度的同时修改的优点，与典型的最先进的硅电容麦克风相比，其可以扩展超声频谱中的声音和声学检测的应用，具有可接受的性能。
Purpose
The purpose of this paper is to propose an alternative approach to improve the performance of microelectromechanical systems (MEMSs) silicon (Si) condenser microphones in terms of operating frequency and sensitivity through the introduction of a secondary material with a contrast of mechanical properties in the corrugated membrane.
Design/methodology/approach
Finite element method from COMSOL is used to analyze the MEMS microphones performance consisting of solid mechanic, electrostatic and thermoviscous acoustic interfaces. Hence, the simulated results could described the physical mechanism of the MEMS microphones, especially in the case of microphones with complex geometry. A 2-D model was used to simplify computation by applying axis symmetry condition.
Findings
The simulation results have suggested that the operating frequency range of the microphone could be extended to be operated beyond 20 kHz in the audible frequency range. The data showed that the frequency resonance of the microphone using a corrugated Si membrane with SiC as the embedded membrane is increased up to 70 kHz compared with 63 kHz for the plane Si membrane, whereas the microphone’s sensitivity is slightly decreased to −79 from −76 dB. Furthermore, the frequency resonance of a corrugated membrane microphone could be improved from 26 to 70 kHz by embedding the SiC material. Last, the sensitivity and frequency resonance value of the microphones could be modified by adjusting the height of the embedded material.
Originality/value
Based on these theoretical results, the proposed modification highlighted the advantages of simultaneous modifications of frequency and sensitivity that could extend the applications of sound and acoustic detections in the ultrasonic spectrum with an acceptable performance compared with the typical state-of-the-art Si condenser microphones.
DOI：
10.1007/s00542-016-2937-9
发表时间：
2017-07
期刊：
Microsystem Technologies
影响因子：
--
作者：
R. Latif;B. Majlis;R. Cheung
通讯作者：
R. Latif;B. Majlis;R. Cheung