Fluorocarbon polymer thin films prepared by three different types of r.f. magnetron sputtering systems
Fluorocarbon polymer thin films prepared by three different types of r.f. magnetron sputtering systems
复制标题
三种不同类型的射频制备氟碳聚合物薄膜
DOI：
10.1016/j.surfcoat.2008.07.035
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发表时间：
2008
影响因子：
5.4
通讯作者：
A. Uemura
中科院分区：
文献类型：
--
作者：
S. Iwamori;N. Hasegawa;A. Uemura
以聚四氟乙烯为靶材，采用三种不同的射频沉积方法制备了氟碳聚合物薄膜。强磁场、弱磁场和非平衡磁场的磁控溅射系统。研究了这些聚合物薄膜的表面形貌、化学结构和水滴的接触角。在强磁场作用下，磁控溅射沉积的聚合物薄膜表面可观察到许多微小的日冕。然而，在弱磁场作用下，磁控溅射沉积的聚合物薄膜表面可以观察到较大的日冕。在非平衡磁控溅射沉积的聚合物薄膜表面可以观察到这两种小的和大的日冕。这些聚合物薄膜的C(1S)XPS谱可分离出五个峰。然而，这些峰的峰强度不同。代表CF2的峰强度随着磁场的增加而降低。
Fluorocarbon polymer thin films were deposited with a poly(tetrafluoroethylene) target by three different types of r.f. magnetron sputtering systems with strong, weak and unbalanced magnetic fields. Surface morphologies, chemical structure and contact angles of water droplets of these polymer thin films were studied. Many tiny prominences can be observed at the surface of the polymer thin film deposited by the magnetron sputtering with a strong magnetic field. However, larger prominences can be observed at the surface of the polymer thin film deposited by the magnetron sputtering with a weak magnetic field. Both of these tiny and large prominences can be observed at the surface of the polymer thin film deposited by an unbalanced magnetron sputtering. Five peaks can be separated in C(1s) XPS spectra of these polymer thin films. However peak intensities of these peaks are different. Peak intensity which represents CF2decreased with increase of the magnetic field.