The efficiency of coaxial KrCl* excilamps
The efficiency of coaxial KrCl* excilamps
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DOI：
10.1088/0022-3727/43/20/205202
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发表时间：
2010-05
期刊：
影响因子：
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通讯作者：
Xiaobo Zhuang;Qiuyi Han;Haojun Zhang;Xiangfen Feng;Markus Roth;O. Rosier;Shaolong Zhu;Shanduan Zhang
中科院分区：
文献类型：
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作者：
Xiaobo Zhuang;Qiuyi Han;Haojun Zhang;Xiangfen Feng;Markus Roth;O. Rosier;Shaolong Zhu;Shanduan Zhang
测量了基于介质阻挡放电的同轴KrCl准分子激光器的光谱、输入功率和222 nm辐射效率。灯的内管具有14/16 mm的内径/外径（ID/OD）。外管的OD为40 mm，壁厚为1.2、1.5或2.0 mm。灯由正弦、矩形和脉冲电子控制齿轮（ECG）驱动。根据Keitz公式，222 nm辐射功率由辐照度导出。输入电功率用示波器测量，结合电压探头和电流探头。结果表明，222 nm辐射的最大效率为9.2%的壁厚为1.2 mm，充满氪（198毫巴）和氯（2毫巴），由脉冲心电图驱动的KrCl* excilamp。讨论了波形、频率、管壁温度和透射率等因素的影响。我们观察到微放电的丝状结构随电压波形的变化而变化。气体组成和压力的结果表明，最佳压力为200毫巴，最佳氯含量为0.4- 1.0%。
The spectrum, input power and 222 nm radiant efficiency were measured for coaxial KrCl* excilamps based on a dielectric barrier discharge. The inner tubes of the lamps have an inner/outer diameter (ID/OD) of 14/16 mm. The OD of the outer tubes is 40 mm with wall thicknesses of 1.2, 1.5 or 2.0 mm. The lamps were driven by sinusoidal, rectangular and pulsed electronic control gears (ECGs). The 222 nm radiant power is derived from irradiance, according to the Keitz formula. The input electric power is measured with an oscilloscope, combined with a voltage probe and a current probe. The results show that the maximum efficiency of the 222 nm radiation is 9.2% for a KrCl* excilamp with a wall thickness of 1.2 mm, filled with krypton (198 mbar) and chlorine (2 mbar), driven by a pulsed ECG. The effects of waveform, frequency, wall temperature and transmittance of the tube are discussed. We observe that the filament configuration of the micro-discharges changes for different voltage waveforms. The results of gas composition and pressure show an optimum pressure at 200 mbar and an optimum chlorine percentage around 0.4–1.0%.