A low loss and power efficient micro-electro-thermally actuated RF MEMS switch for low power and low loss applications
A low loss and power efficient micro-electro-thermally actuated RF MEMS switch for low power and low loss applications
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DOI：
10.1007/s00542-017-3684-2
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发表时间：
2018-07
期刊：
影响因子：
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通讯作者：
Parviz Zolfaghari;Vahid Arzhang;M. Zolfaghari
中科院分区：
文献类型：
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作者：
Parviz Zolfaghari;Vahid Arzhang;M. Zolfaghari
本文提出了一种新型横向微电热驱动 RF MEMS 开关。尽管许多 RF MEMS 开关需要连续驱动电压以将开关保持在导通状态，但所提出的开关在没有任何直流电源的情况下仍保持导通状态。开关的机械设计使得开关的接触力在mN范围内，且直流功耗为零。对开关进行了建模并对其运行进行了全面分析。制造工艺与标准 MetalMUMP 工艺完全兼容。该开关要求 U 形和 V 形执行器的驱动电压分别为 0.5 和 0.9 V。开关通常处于关闭状态，隔离度高达 100 GHz 时为 − 20 dB。开关在导通状态下的插入损耗在高达 40 GHz 时优于 −0.1 dB，回波损耗在高达 100 GHz 时低于 −10 dB。开关的功耗受限于开关在关断和接通状态之间的转换时间。根据分析和数值模拟，开关的接触电阻为 0.028 Ω。本文提出的开关专用于移动前端应用，尤其是信号损耗和功耗是主要限制的天线开关网络。
A novel laterally and micro-electro-thermally actuated RF MEMS switch is presented in this paper. Despite many RF MEMS switches requiring continuous actuation voltage to hold the switch at ON-state, the proposed switch remains ON without any DC power. The mechanical design of the switch is in such a way that, the contact force of the switch is in mN range with zero DC power consumption. The switch is modeled and its operation is comprehensively analyzed. The fabrication process is completely compatible with standard MetalMUMPs process. The switch requires actuation voltages of 0.5 and 0.9 V for U-shaped and V-shaped actuators, respectively. The switch is normally OFF with isolation of − 20 dB up to 100 GHz. The insertion loss of the switch at ON-state is better than − 0.1 dB up to 40 GHz and the return loss is below − 10 dB up to 100 GHz. The power consumption of the switch is confined to the transition time of the switch between OFF and ON states. Based on analytical and numerical simulations, the contact resistance of the switch is 0.028 Ω. The proposed switch in this paper is dedicated for applications in mobile front-ends especially antenna switch networks where the signal loss and power consumption are the main constraints.