Micromachined millimetre-wave passive components at 38 and 77 GHz
Micromachined millimetre-wave passive components at 38 and 77 GHz
复制标题
38 和 77 GHz 微机械毫米波无源元件
DOI：
--
复制
发表时间：
2009
期刊：
影响因子：
--
通讯作者：
Rob Lewis
中科院分区：
文献类型：
--
作者：
Yi Wang;P. Ke;Michael J. Lancaster;F. Huang;Richard Lewis;M. Ke;Michael J. Lancaster;Rob Lewis
发展了一种用于三维充气结构毫米波器件（如矩形同轴线或波导）的精密微细加工技术。这些器件是通过将几层厚度为几百微米的微加工限定的切片粘合而形成的。切片是由光刻法定义的厚光刻胶SU 8，或具有由深反应离子蚀刻定义的图案的硅;两者都通过蒸发涂覆有金。与传统的精密金属加工相比，该工艺简单且成本低，但产生具有良好性能的毫米波元件。组件重量轻，真正的充气，没有介电支持。本文回顾了这些微机械毫米波组件在38和77 GHz的通信和雷达应用。
A precision micro-fabrication technique has been developed for millimetre-wave components of air-filled three-dimensional structures, such as rectangular coaxial lines or waveguides. The devices are formed by bonding several layers of micromachining defined slices with a thickness of a few hundred micrometres. The slices are thickphotoresist SU8 defined by photolithography, or silicon with a pattern defined by deep reactive ion etching; both are coated with gold by evaporation. The process is simple, and low-cost, as compared with conventional precision metal machining, but yields mm-wave components with good performance. The components are light weight and truly airfilled with no dielectric support. This paper reviews several of these micromachined mm-wave components at 38 and 77 GHz for communications and radar applications.
使用 SU8 光致抗蚀剂的微机械矩形同轴线和腔体谐振器，适用于 77 GHz 应用
DOI：
10.1109/apmc.2008.4957973
发表时间：
2008
期刊：
--
影响因子：
--
作者：
Maolong Ke
通讯作者：
Maolong Ke