Friction and wear property of a-CNx coatings sliding against Si3N4 balls in water
Friction and wear property of a-CNx coatings sliding against Si3N4 balls in water
复制标题
a-CNx涂层与Si3N4球在水中滑动的摩擦磨损性能
DOI：
10.1016/j.wear.2006.11.048
复制
发表时间：
2007-09-10
期刊：
影响因子：
5
通讯作者：
Dai, Zhendong
中科院分区：
文献类型：
--
作者：
Zhou, Fei;Wang, Xiaolei;Dai, Zhendong
采用离子束辅助沉积法（IBAD）在Si（100）基片和Si 3 N4基片上制备了非晶氮化碳（a-CNx）涂层，并用X射线光电子能谱（XPS）分析了涂层的组成和化学键合。采用纳米压痕法测量了a-CNx涂层的硬度，并研究了a-CNx涂层与Si 3 N4球在水中的摩擦磨损行为。结果表明，a-CNx涂层含有12原子%的主要化学键为sp（2）C=N和Sp（3）C-N。a-CNx涂层的纳米硬度为29 GPa。在滑动速度为0.16 m/s时，磨合后，当法向载荷小于3.5 N时，平均稳态摩擦系数在0.02左右变化，当法向载荷为5 N时，平均稳态摩擦系数从0.018急剧下降到0.007。对于自配Si_3N_4，Si_3N_4球的比磨损率略高于Si_3N_4盘，而对于a-CNx/Si_3N_4，Si_3N_4球的比磨损率略小于a-CNx涂层。此外，Si_3N_4球对a-CNx涂层滑动的比磨损率降低了一个因素，对Si_3N_4在水中相比，高达35。这表明，a-CNx涂层/Si_3N_4球的磨损机理是a-CNx涂层与水在摩擦过程中发生摩擦化学反应，在涂层表面形成一层碳质转移膜，而自匹配Si_3N_4陶瓷的磨损机理是氮化硅与水在接触区形成硅胶。(C)2007 Elsevier B. V.保留所有权利。
Amorphous carbon nitride coatings (a-CNx) were deposited on Si(100) wafers and Si3N4 disks using ion beam assisted deposition (IBAD), and their composition and chemical bonding were determined by X-ray photoelectron spectroscopy (XPS). The a-CNx coatings' hardness was measured by nano-indentation and the friction and wear behavior of a-CNx coating sliding against a Si3N4 ball in water was investigated. The results indicated that the a-CNx, coatings contained 12 at.% nitrogen and the major chemical bonding was sp(2) C=N and Sp(3) C-N. The nano-hardness of the a-CNx coatings was 29 GPa. At a sliding velocity of 0.16 m/s and after running-in, the mean steady-state friction coefficient varied around 0.02 when the normal load was lower than 3.5 N, and then decreased abruptly from 0.018 to 0.007 at 5 N. For self-mated Si3N4, the specific wear rate of a Si3N4 ball was a little higher than that of a Si3N4 disk, while for a-CNx/Si3N4, the specific wear rate of a Si3N4 ball was slightly smaller than that of a-CNx coating. Furthermore, the specific wear rate of Si3N4 ball sliding against a-CNx coating was reduced by a factor up to 35 in comparison to that against Si3N4 in water. This indicated that the wear mechanism of a-CNx coating/Si3N4 ball was the formation of a carbonaccous transfer film on the a-CNx coatings via a tribochemical reaction between a-CNx, coatings and water induced by friction, while that of self-mated Si3N4 ceramics was the formation of silica gel on the contact zone via the reaction of silicon nitride and water. (C) 2007 Elsevier B.V. All rights reserved.