Mechanical characterization of segment-structured hydrogen-free a-C films fabricated by filtered cathodic vacuum arc method
Mechanical characterization of segment-structured hydrogen-free a-C films fabricated by filtered cathodic vacuum arc method
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DOI：
10.1016/j.surfcoat.2015.07.069
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发表时间：
2015-09
影响因子：
5.4
通讯作者：
Shota Kondo;S. Liza;N. Ohtake;H. Akasaka;M. Matsuo;Yoshinao Iwamoto
中科院分区：
文献类型：
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作者：
Shota Kondo;S. Liza;N. Ohtake;H. Akasaka;M. Matsuo;Yoshinao Iwamoto
在这项工作中，研究了硅和SUS403衬底上沉积的段状无氢c薄膜的力学和摩擦学行为，并与传统的无氢c薄膜进行了比较。采用过滤阴极真空电弧（FCVA）系统，以金属网为掩膜制备了段状无氢碳膜。结果表明，在不改变薄膜力学性能的情况下，片状无氢c膜（220 × 220 μm2，槽宽30 μm）的内应力比连续型无氢c膜小25%左右。由于高压应力的限制，硅和SUS403衬底的最大薄膜厚度分别为500 nm和600 nm。摩擦学试验结果表明，与常规无氢- c膜相比，片状无氢- c膜具有优异的耐磨性和较低的摩擦系数。凹槽在减少内应力和捕获磨损碎片方面的作用解释了这种更好的性能。此外，较厚的节段结构无氢c膜可以抑制节段边缘的剧烈磨损。结果表明，片状无氢c膜具有减小应力和提高摩擦性能的优点。
In this work, the mechanical and tribological behavior of segment-structured hydrogen-freea-C films deposited on silicon and SUS403 substrates has been studied and compared with those of conventional hydrogen-freea-C films. Segment-structured hydrogen-freea-C films were fabricated using metal meshes as masks by filtered cathodic vacuum arc (FCVA) system. It was found that segment-structured hydrogen-freea-C films (220 × 220 μm2of segment with 30 μm of groove width) have approximately 25% less internal stress than a continuous film without changing their mechanical properties. The maximum film thicknesses were 500 and 600 nm for silicon and SUS403 substrates, respectively owing to a limitation imposed by high compressive stress. Tribological test results indicate that the segment-structured hydrogen-freea-C films have excellent wear resistance and a lower friction coefficient than conventional hydrogen-freea-C films. The role of grooves in reducing internal stress and trapping the wear debris explains this better performance. Furthermore, a thicker segment-structured hydrogen-freea-C film can suppress the intensive wear of the segment edge. Overall results indicate that the segment-structured hydrogen-freea-C films have the advantages of reduced stress and improved the tribological performance.