Ultra-Tuning of nonlinear drumhead MEMS resonators by Electro-Thermoelastic buckling
Ultra-Tuning of nonlinear drumhead MEMS resonators by Electro-Thermoelastic buckling
复制标题
通过电热弹性屈曲对非线性鼓面 MEMS 谐振器进行超调谐
DOI：
10.1016/j.ymssp.2023.110331
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发表时间：
2023
影响因子：
8.4
通讯作者：
Tawfick, Sameh
中科院分区：
文献类型：
--
作者：
Kanj, Ali;Ferrari, Paolo;van der Zande, Arend M.;Vakakis, Alexander F.;Tawfick, Sameh
与线性谐振器相比，非线性微机电系统（MEMS）谐振器通过实现频率调谐和增加带宽，为传感和信号处理提供了新的机会。在这里，我们设计、制造和研究了表现出强烈非线性动力学的鼓面谐振器，并开发了一个降阶模型（ROM）来准确捕获它们的响应。谐振器经过静电介导的热弹性屈曲，其固有频率从4.7 MHz调整到11.3 MHz，可调性因子为2.4倍。此外，施加的屈曲使谐振器的非线性在纯加劲、纯软化甚至从软化到加劲之间切换。要获得这些奇异的动力学，需要精确控制谐振器临界屈曲点附近的温度和直流静电力。为了解释观察到的可调性，我们开发了一个基于一维物理的ROM来预测这些鼓面谐振器的基本弯曲模式的线性和非线性响应。ROM捕获由三个来源引起的内应力的动态影响：制造过程中的残余应力，组成层之间热膨胀的不匹配，以及最后施加的静电力。本文开发的新型ROM不仅复制了即使在临界屈曲状态附近也能观察到的线性（误差在5.5%以内）和非线性响应的可调性，而且还提供了对软化和硬化之间相互作用的深刻直觉，这对于类似设备的精确设计是非常宝贵的。这种显著的非线性和大的固有频率可调性是片上声学器件在信号处理、滤波和MEMS波导等广泛应用中的有价值的特征。
Nonlinear micro-electro-mechanical systems (MEMS) resonators open new opportunities in sensing and signal manipulation compared to their linear counterparts by enabling frequency tuning and increased bandwidth. Here, we design, fabricate and study drumhead resonators exhibiting strongly nonlinear dynamics and develop a reduced order model (ROM) to capture their response accurately. The resonators undergo electrostatically-mediated thermoelastic buckling, which tunes their natural frequency from 4.7 to 11.3 MHz, a factor of 2.4× tunability. Moreover, the imposed buckling switches the nonlinearity of the resonators between purely stiffening, purely softening, and even softening-to-stiffening. Accessing these exotic dynamics requires precise control of the temperature and the DC electrostatic forces near the resonator’s critical-buckling point. To explain the observed tunability, we develop a one-dimensional physics-based ROM that predicts the linear and nonlinear response of the fundamental bending mode of these drumhead resonators. The ROM captures the dynamic effects of the internal stresses resulting from three sources: The residual stresses from the fabrication process, the mismatch in thermal expansion between the constituent layers, and lastly, the applied electrostatic forces. The novel ROM developed in this article not only replicates the observed tunability of linear (within 5.5% error) and nonlinear responses even near the states of critical buckling but also provides insightful intuition on the interplay among the softening and stiffening, which is invaluable for the precise design of similar devices. This remarkable nonlinear and large tunability of the natural frequency are valuable features for on-chip acoustic devices in broad applications such as signal manipulation, filtering, and MEMS waveguides.