Femtosecond-pulse visible laser processing of transparent materials
Femtosecond-pulse visible laser processing of transparent materials
复制标题
透明材料的飞秒脉冲可见激光加工
DOI：
10.1016/0169-4332(95)00446-7
复制
发表时间：
1996
影响因子：
6.7
通讯作者：
W. Kautek
中科院分区：
文献类型：
--
作者：
J. Krüger;W. Kautek
工业和研发应用中的高功率激光器提出了光学元件可靠性和退化的普遍问题。各种透明介电材料的非线性相互作用的系统研究，例如提出了玻璃、熔融石英和聚合物，激光脉冲的强度范围高达 1013W cm−2。另一方面，可见光谱范围（300 fs；620 nm，~ 2 eV）的飞秒脉冲激光加工可以实现透明电介质的精确微结构，而不会破坏剩余材料。硅酸盐玻璃和熔融石英的损伤和烧蚀阈值注量均高于 1.2 J cm−2。已经观察到两种不同的光子吸收机制。第一个发生在孵化范围内的初始激光脉冲期间。在那里，多光子吸收导致适度的能量体积密度。这些足以产生形态变化和光学活性缺陷位点（颜色中心），从而提供与第二种机制相关的更高的吸收率。它导致气化而没有熔体参与。
High-power lasers in industrial and R & D applications raise the general problem of reliability and degradation of optical components. A systematic study of nonlinear interaction of various transparent dielectric materials as e.g. glasses, fused silica, and polymers, with laser-pulses in the intensity range of up to 1013W cm−2is presented. On the other hand, femtosecond-pulse laser processing in the visible spectral range (300 fs; 620 nm, ∼ 2 eV) allows precise microstructuring of transparent dielectrics without disruption of the remnant material. Damage and ablation threshold fluences occur above 1.2 J cm−2at both silicate glasses and fused silica. Two different photon absorption mechanisms have been observed. The first occurs during the initial laser pulses in the incubation range. There, multiphoton absorption results in moderate energy volume densities. These are sufficient to generate morphological changes and optically active defect sites (colour centres) which provide a much higher absorptivity relevant for the second mechanism. It results in gasification without participation of melt.