Two-dimensional single-shot tomography using a virtually imaged phased array and a spatial phase modulator.
Two-dimensional single-shot tomography using a virtually imaged phased array and a spatial phase modulator.
复制标题
使用虚拟成像相控阵和空间相位调制器的二维单次断层扫描。
DOI：
10.1364/ao.51.005224
复制
发表时间：
2012
期刊：
影响因子：
1.9
通讯作者：
Kohei Suzuki
中科院分区：
文献类型：
--
作者：
T. Shioda;T. Morisaki;T. Banh;Kohei Suzuki
在保持分辨率和测量范围的前提下，将虚拟成像相控阵（VIPA）光学干涉仪从一维单次成像技术扩展到二维层析成像技术。通过在干涉仪中安装空间相位调制器，利用二维电荷耦合器件（CCD）图像传感器跟踪延迟时间到像素数，实现了单次测量。样品位置的灵活性在实验上被确认为>25 mm，相对于VIPA相干性，干涉阶数被确认为35。作为示范，堆叠量块的表面轮廓进行了观察。对于表面轮廓术，表面位置的重复性为5 μm。此外，使用玻璃板观察到多层结构。以光纤放大器产生的放大自发辐射光为光源，实验分辨率为53 μm。通过2D-CCD以每秒30帧（FPS）的帧速率证实了单次测量，并且它提供了使用VIPA光学设备成功实现2D无扫描轮廓术的证据。
A virtually imaged phased array (VIPA) installed optical interferometer has been expanded to the two-dimensional (2D) tomography from the previous one-dimensional single-shot imaging technique with keeping the resolution and the measurement range. A single-shot measurement has been realized by a spatial phase modulator installed in the optical interferometer and tracing the delay time to pixel numbers on a 2D charge-coupled device (CCD) image sensor. The flexibility of the sample position was experimentally confirmed to be >25 mm, in relation to the VIPA coherency, for which the number of the interference order was confirmed to be 35. As a demonstration, a surface profile of stacked gauge blocks was observed. The repeatability of the surface position was 5 μm for the surface profilometry. In addition, a multilayer structure was observed using a glass plate. The experimental resolution was 53 μm when the amplified spontaneous emission light generated by the optical fiber amplifier was used for the light source. The single-shot measurement was confirmed by the 2D-CCD at a frame rate of 30 frames per second (FPS), and it provided evidence that the 2D scanless profilometry was successfully achieved using the VIPA optical device.