Super-Sensitive Optical Biosensor with a Spectrometer on a Chip

Super-Sensitive Optical Biosensor with a Spectrometer on a Chip
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DOI:
10.5504/bbeq.2013.0055
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发表时间:
2013-01
影响因子:
1.4
通讯作者:
Jun-Hwa Song;Linchun Chen;Bojun Li
Jun-Hwa Song;Linchun Chen;Bojun Li
中科院分区:
工程技术4区
文献类型:
--
作者:
Jun-Hwa Song;Linchun Chen;Bojun Li

文献摘要

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我们提出了一种基于非晶硅光子平台的超灵敏光学生物传感器设计,该设计将圆孔缺陷与蚀刻衍射光栅(EDG)光谱仪集成在一起。通过适当的缺陷直径,传感器芯片可以达到约12450 nm/RIU的灵敏度和可接受的制造公差。文中还分析了圆孔缺陷对传感应用性能的影响。结果表明,谐振散射行为有一个自由的光谱范围,而缺陷尺寸的线性灵敏度范围是有限的。结果还表明,轻微的椭圆度对操作灵敏度的影响有限。
ABSTRACT We have proposed a super-sensitive optical biosensor design by integrating a circular-hole defect with an etched diffraction grating (EDG) spectrometer based on amorphous silicon photonic platforms. With an appropriate defect diameter, the sensor chip can contribute to ∼ 12450 nm/RIU sensitivity and an acceptable fabrication tolerance. The influence of the circular-hole defect on the performance of sensing applications is also characterized. The results show that there is a free spectral range for the resonant scattering behavior and a limited linear sensitivity range for optical sensing applications in terms of the defect size. The results also indicate that a slight ellipticity has limited influence on the operational sensitivity.