Measurement of Reactive Species for the Development of Plasma-on-Chip
Measurement of Reactive Species for the Development of Plasma-on-Chip
复制标题
用于片上等离子体开发的反应物质测量
DOI:
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发表时间:
2016
期刊:
影响因子:
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通讯作者:
S. Kumagai
中科院分区:
文献类型:
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作者:
J.-S. Oh;S. Kojima;A. Hatta;M. Sasaki;S. Kumagai