Folded Floating-Gate CMOS Biosensor for the Detection of Charged Biochemical Molecules
Folded Floating-Gate CMOS Biosensor for the Detection of Charged Biochemical Molecules
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DOI：
10.1109/jsen.2011.2149514
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发表时间：
2011-11-01
影响因子：
4.3
通讯作者：
Pandey, Santosh
中科院分区：
文献类型：
--
作者：
Chen, Baozhen;Parashar, Archana;Pandey, Santosh
实现了一种用于带电生化分子检测的折叠浮栅CMOS生物传感器。该生物传感器包括具有浮栅、控制栅和传感区域的场效应晶体管。带电的生化分子放置在感应区域上，在浮栅上产生电压，并在阈值特性上产生相对位移。与传统器件相比，这里的浮栅是折叠的，可以横跨整个器件。这允许我们将传感区域置于场效应晶体管（FET）之上，从而减少了总器件面积。所制备的器件对带电荷的聚氨基酸的极性和浓度具有良好的灵敏度。该装置的可能应用包括空间和时间电荷迁移的电子检测，例如在生物过程中。
A folded floating-gate CMOS biosensor is realized for the detection of charged biochemical molecules. The biosensor comprises a field-effect transistor with a floating-gate, a control-gate, and a sensing area. Charged biochemical molecules placed on the sensing area induce a voltage on the floating-gate and a relative shift in the threshold characteristics. Compared to conventional devices, the floating-gate here is folded to span the entire device. This allows us to place the sensing area above the field-effect transistor (FET), thus reducing the total device area. The fabricated devices show good sensitivity to the polarity and concentration of charged poly amino acids. Possible applications of the device include electronic detection of spatial and temporal charge migration such as in biological processes.