Experimental investigations into machining accuracy and surface roughness of microgrooves fabricated by electrochemical micromachining
Experimental investigations into machining accuracy and surface roughness of microgrooves fabricated by electrochemical micromachining
复制标题
DOI：
10.1177/0954405414539486
复制
发表时间：
2015-10-01
期刊：
影响因子：
2.6
通讯作者：
Bhattacharyya, B.
中科院分区：
文献类型：
--
作者：
Rathod, V.;Doloi, B.;Bhattacharyya, B.
微沟槽是微产品上的基本微特征之一，用于各种领域的微系统集成。微产品的使用寿命和产品功能直接受到其上制作的微凹槽的形状、尺寸和表面质量的影响。因此，这些是在微器件上制作微凹槽时需要考虑的重要标准。本文介绍了用电化学微细加工技术在不锈钢表面加工微槽的实验研究。研究了微电解加工工艺参数如电压、脉冲频率、占空比、电解液浓度和微工具扫描速度对加工精度的影响，即微槽宽度过切、长度过切和深度过切、材料去除率、微槽线性度、深度轮廓和表面光洁度。从实验结果中，获得的最佳参数为施加电压为2.6 V，脉冲频率为8 MHz，占空比为30%，电解液浓度为0.15 M H2SO 4，和微工具扫描速度为93.75 m/s的加工精确的微槽，具有最佳的表面光洁度。最后，如矩形截面的C形微槽和多个微槽的微热器件中所需的微特征已被加工与优化的参数设置。本研究对于微驱动器、微泵、微冷却器、微混合器等微产品的微槽加工具有一定的参考价值。
Microgrooves are one of the basic microfeatures fabricated on different microproducts, used to integrate micro systems in various fields. Service life and product functioning of microproducts are directly influenced by shape, size, and surface quality of microgrooves fabricated on it. Hence, these are the important criteria to be considered while fabricating microgrooves on micro devices. This article presents the experimental study into fabrication of microgrooves on stainless steel by electrochemical micromachining. The influence of electrochemical micromachining process parameters like applied voltage, pulse frequency, duty ratio, electrolyte concentration, and microtool scanning speed on machining accuracy, that is, width overcut, length overcut and depth overcut, material removal rate, linearity of microgroove, depth profile, and surface finish were investigated during microgroove generation. From the experimental results, optimal parameters obtained were applied voltage of 2.6 V, pulse frequency of 8 MHz, 30% duty ratio, electrolyte concentration of 0.15 M H2SO4, and microtool scanning speed of 93.75 m/s for machining of accurate microgroove, with best surface finish. Finally, microfeatures like C-shaped microgroove of rectangular cross section and multiple microgrooves as required in micro thermal devices have been machined with optimal parametric settings. This study will be useful for machining of need-based microgrooves on microproducts like micro actuators, micro pumps, micro coolers, and micromixers.