Fabrication of a nanoelectromechanical switch using a suspended carbon nanotube
Fabrication of a nanoelectromechanical switch using a suspended carbon nanotube
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DOI：
10.1063/1.1868064
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发表时间：
2005-02-21
影响因子：
4
通讯作者：
Kim, JM
中科院分区：
文献类型：
--
作者：
Cha, SN;Jang, JE;Kim, JM
报道了一种由悬浮多壁碳纳米管和自对准电极组成的纳米机电开关器件的制备和表征。该装置具有三极管结构，其设计使得悬浮的碳纳米管通过纳米管和另一自对准电极之间的排斥力被机械地切换到两个自对准电极之一。将碳纳米管分散在涂有二氧化硅的硅片上，并使用扫描电子显微镜测绘过程记录它们的位置。接触电极和自对准偏转电极由包括电子束光刻、金属薄膜沉积和剥离的工艺形成。随着栅极电压的变化，电学测量显示出明确的导通和关断状态。测量的机电开关的阈值电压类似于3.6V(C)2005年美国物理研究所。
Fabrication and characterization of a nanoelectromechanical switching device consisting of a suspended multiwalled carbon nanotube and self-aligned electrodes is reported. The device has a triode structure and is designed so that a suspended carbon nanotube is mechanically switched to one of two self-aligned electrodes by repulsive electrostatic forces between the nanotube and the other self-aligned electrode. Carbon nanotubes are dispersed on an SiO2 coated Si wafer and their locations recorded using a scanning electron microscope mapping process. Contact electrodes and self-aligned deflection electrodes are formed by a process comprising electron beam lithography, metallic thin film deposition, and lift-off. The electrical measurements show well-defined ON and OFF states with change of gate voltage. The measured threshold voltage for electromechanical switching is similar to 3.6 V. (c) 2005 American Institute of Physics.