Three-dimensional imaging using fast micromachined electro-absorptive shutter
Three-dimensional imaging using fast micromachined electro-absorptive shutter
复制标题
DOI：
10.1117/1.jmm.12.2.023011
复制
发表时间：
2013-04-01
影响因子：
2
通讯作者：
Lee, Yong Tak
中科院分区：
文献类型：
--
作者：
Park, Yong-Hwa;Cho, Yong-Chul;Lee, Yong Tak
介绍了一种用于三维图像采集的20 MHz开关式高速光调制器件及其系统样机。对于3-D图像捕获，该系统利用飞行时间（TOF）的原则，通过一个20 MHz的高速微机械电吸收调制器，所谓的光学快门。利用具有光学谐振腔和金属有机化学气相沉积工艺生长的光吸收外延层的多层结构的电吸收机制获得高速调制。光学快门装置被特别设计成具有小的电阻-电容-时间常数以获得高速调制。光学快门位于标准高分辨率互补金属氧化物半导体图像传感器的前面。光学快门调制传入的红外图像以获取深度图像。所提出的新颖的光学快门装置使得能够捕获全高分辨率深度图像，这已被先前的深度捕获技术限制于视频图形阵列（VGA）。建议的3D图像传感设备可以对3D相关业务产生至关重要的影响，例如3D相机、手势识别、用户界面和3D显示器。本文介绍了基于微光机电系统的光学快门的设计，制造，表征，3-D相机系统原型，和图像评价。(C)作者。由SPIE根据知识共享归因3.0未移植许可证发布。分发或复制本作品的全部或部分需要原始出版物的全部归属，包括其DOI。
A 20-MHz switching high-speed light-modulating device for three-dimensional (3-D) image capturing and its system prototype are presented. For 3-D image capturing, the system utilizes a time-of-flight (TOF) principle by means of a 20-MHz high-speed micromachined electro-absorptive modulator, the so-called optical shutter. The high-speed modulation is obtained by utilizing the electro-absorption mechanism of the multilayer structure, which has an optical resonance cavity and light-absorption epilayers grown by metal organic chemical vapor deposition process. The optical shutter device is specially designed to have small resistor-capacitor-time constant to get the high-speed modulation. The optical shutter is positioned in front of a standard high-resolution complementary metal oxide semiconductor image sensor. The optical shutter modulates the incoming infrared image to acquire the depth image. The suggested novel optical shutter device enables capturing of a full high resolution-depth image, which has been limited to video graphics array (VGA) by previous depth-capturing technologies. The suggested 3-D image sensing device can have a crucial impact on 3-D-related business such as 3-D cameras, gesture recognition, user interfaces, and 3-D displays. This paper presents micro-opto-electro-mechanical systems-based optical shutter design, fabrication, characterization, 3-D camera system prototype, and image evaluation. (C) The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.