Comprehensive description of a Grimm-type glow discharge source used for optical emission spectrometry: A mathematical simulation
Comprehensive description of a Grimm-type glow discharge source used for optical emission spectrometry: A mathematical simulation
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DOI：
10.1016/s0584-8547(97)00148-1
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发表时间：
1998-03
期刊：
影响因子：
--
通讯作者：
A. Bogaerts;R. Gijbels
中科院分区：
文献类型：
--
作者：
A. Bogaerts;R. Gijbels
一个由不同模型组成的三维模型网络被应用于格里姆型辉光放电单元，该模型用于描述铜阴极直流氩辉光放电中各种物种的行为。给出了辉光放电光谱分析中典型放电条件下的模拟结果(例如，电流与压力和电压的函数关系、整个放电过程中的电势分布、各种等离子体的密度分布和能量、等离子体中碰撞过程和阴极溅射的信息)。研究了压力、电压和电流对计算结果的影响，并与前人在典型辉光放电质谱学条件下的计算结果进行了比较。计算结果与实验数据进行了比较，总体上达到了较好的一致性，这表明模型提供了一幅逼真的格里姆型辉光放电图像。
A three-dimensional modeling network, consisting of different models for describing the behavior of the various species present in a direct current argon glow discharge with copper cathode, has been applied to the Grimm-type glow discharge cell. The modeling results (e.g. the electrical current as a function of pressure and voltage, the potential distribution throughout the discharge, density profiles and energies of the various plasma species, information about collision processes in the plasma and of cathode sputtering) are presented at typical discharge conditions used for glow discharge optical emission spectrometry. The influence of pressure, voltage and current on the calculated results is investigated and a comparison is made with the values obtained in our previous work for typical glow discharge mass spectrometry conditions. The calculation results are compared with experimental data whenever available and in general good agreement is reached, which demonstrates that the models present a realistic picture of the Grimm-type glow discharge.