245-GHz Transmitter Array in SiGe BiCMOS for Gas Spectroscopy
245-GHz Transmitter Array in SiGe BiCMOS for Gas Spectroscopy
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用于气体光谱分析的 SiGe BiCMOS 245 GHz 发射器阵列
DOI：
10.1109/tthz.2015.2513278
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发表时间：
2016
影响因子：
3.2
通讯作者：
H. Hubers
中科院分区：
文献类型：
--
作者：
K. Schmalz;J. Borngraber;W. Debski;M. Elkhouly;Ruoyu Wang;P. Neumaier;D. Kissinger;H. Hubers
实现了一种用于气体光谱系统的245 GHz发射机（TX）阵列与集成天线阵列。它由一个具有1/64分频器的推挽式VCO、功率放大器、倍频器和具有局部背面蚀刻的片上天线组成。TX频率在238至252 GHz的范围内可调。TX阵列采用0.13 μ mSiGe：C BiCMOS工艺制作，最大f T /f为300 GHz/500 GHz。其输出功率在245 GHz时约为7 dBm，有效各向同性辐射功率（EIRP）在245 GHz时达到18 dBm。气体光谱系统的主要部件是SiGe BiCMOS中的TX和接收器（RX）以及气体吸收单元。通过测量气态甲醇（CH 3OH）的高分辨率吸收光谱来证明该光谱系统的灵敏度。由于TX阵列提供的功率增加，光谱仪的灵敏度可以显著增加。
A 245-GHz transmitter (TX) array with an integrated antenna-array for a gas spectroscopy system has been realized. It consists of a push-push VCO with a 1/64 frequency divider, power amplifiers, frequency doublers, and on-chip antennas with localized backside etching. The TX-frequency is tunable in the range from 238 to 252 GHz. The TX-array has been fabricated in a 0.13- μm SiGe:C BiCMOS technology with f T /f max of 300 GHz/500 GHz. Its output power is approximately 7 dBm at 245 GHz, and the effective isotropically radiated power (EIRP) reaches 18 dBm at 245 GHz. The main components of the gas spectroscopy system are a TX and a receiver (RX) in SiGe BiCMOS as well as a gas absorption cell. The sensitivity of this spectroscopy system is demonstrated by measuring the high-resolution absorption spectrum of gaseous methanol ( CH3OH). Due to the increased power provided by the TX-array, the sensitivity of the spectrometer can be increased significantly.