Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading
Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading
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DOI：
10.1016/j.bios.2012.06.023
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发表时间：
2012-10-01
影响因子：
12.6
通讯作者：
Luo, J. K.
中科院分区：
文献类型：
--
作者：
Garcia-Gancedo, L.;Pedros, J.;Luo, J. K.
设计了同时支持多个共振模式的薄膜体声波谐振器(FBAR)器件，用于重力传感。讨论了在单个器件中产生双模的机制，基于有限元分析的理论计算允许制造谐振模式对温度变化具有相反反应的FBAR；其中一个模式随着温度的升高而呈现正频移，而另一个模式呈现负移。对于质量负载，这两种模式都表现出负频移，因此，通过同时监测这两种模式，可以区分谐振频率的变化是由于质量负载还是温度变化(或两者的组合)，从而避免重量传感中的错误正/负响应，而不需要额外的参考设备或复杂的电子设备。(C)2012爱思唯尔B.V.保留所有权利。
Thin film bulk acoustic wave resonator (FBAR) devices supporting simultaneously multiple resonance modes have been designed for gravimetric sensing. The mechanism for dual-mode generation within a single device has been discussed, and theoretical calculations based on finite element analysis allowed the fabrication of FBARs whose resonance modes have opposite reactions to temperature changes; one of the modes exhibiting a positive frequency shift for a rise of temperature whilst the other mode exhibits a negative shift. Both modes exhibit negative frequency shift for a mass load and hence by monitoring simultaneously both modes it is possible to distinguish whether a change in the resonance frequency is due to a mass load or temperature variation (or a combination of both), avoiding false positive/negative responses in gravimetric sensing without the need of additional reference devices or complex electronics. (C) 2012 Elsevier B.V. All rights reserved.