Synthesis, microstructural characterization and optical properties of undoped, V and Sc doped ZnO thin films
Synthesis, microstructural characterization and optical properties of undoped, V and Sc doped ZnO thin films
复制标题
DOI：
10.1016/j.jallcom.2011.01.044
复制
发表时间：
2011-06-01
影响因子：
6.2
通讯作者：
Miki-Yoshida, M.
中科院分区：
文献类型：
--
作者：
Amezaga-Madrid, P.;Antunez-Flores, W.;Miki-Yoshida, M.
当掺杂低比例的非磁性（V, Sc）或磁性3d （Co, Mn, Ni, Fe）阳离子时，许多半导体氧化物（ZnO, TiO2, SnO2）表现为铁磁性。由于在材料中集成了半导体和磁性，它们引起了极大的兴趣。鉴于ZnO具有光学透明和n或p型电导率，它是最有希望完成这些任务的材料之一。本文报道了未掺杂、V和Sc掺杂氧化锌薄膜的合成、微观结构表征和光学性能。采用气溶胶辅助化学气相沉积法制备了添加V和Sc的ZnO基薄膜。V和Sc分别掺入前驱体溶液中。薄膜均匀、透明、无光散射。利用掠入射x射线衍射、扫描电镜和扫描探针显微镜对膜的微观结构进行了表征。用原子力显微镜测量了平均晶粒尺寸和表面均方根粗糙度。掺杂ZnO薄膜的微观结构取决于掺杂材料的种类和用量。光学性质由镜面反射光谱和透射光谱测定。对实验结果进行了分析，确定了薄膜的光学常数和带隙。光学带隙随Sc掺杂量的增加而增大。(C) 2011 Elsevier B.V.版权所有
Many semiconductor oxides (ZnO, TiO2, SnO2) when doped with a low percentage of non-magnetic (V, Sc) or magnetic 3d (Co, Mn, Ni, Fe) cation behave ferromagnetically. They have attracted a great deal of interest due to the integration of semiconducting and magnetic properties in a material. ZnO is one of the most promising materials to carry out these tasks in view of the fact that it is optically transparent and has n or p type conductivity. Here, we report the synthesis, microstructural characterization and optical properties of undoped, V and Sc doped zinc oxide thin films. ZnO based thin films with additions of V and Sc were deposited by the Aerosol Assisted Chemical Vapour Deposition method. V and Sc were incorporated separately in the precursor solution. The films were uniform, transparent and non-light scattering. The microstructure of the films was characterized by Grazing Incidence X-ray Diffraction, Scanning Electron Microscopy, and Scanning Probe Microscopy. Average grain size and surface rms roughness were estimated by the measurement of Atomic Force Microscopy. The microstructure of doped ZnO thin films depended on the type and amount of dopant material incorporated. The optical properties were determined from specular reflectance and transmittance spectra. Results were analyzed to determine the optical constant and band gap of the films. An increase in the optical band gap with the content of Sc dopant was obtained. (C) 2011 Elsevier B.V. All rights reserved.