Force measurements of polysilicon thermal microactuators
Force measurements of polysilicon thermal microactuators
复制标题
多晶硅热微执行器的力测量
DOI：
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发表时间：
1996
期刊：
影响因子：
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通讯作者：
J. Comtois
中科院分区：
文献类型：
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作者：
J. R. Reid;V. Bright;J. Comtois
表面微加工多晶硅热微致动器提供大的偏转，同时需要低驱动电压和占用小的器件面积。由热致动器提供的力目前尚不清楚。因此，设计并制造了力测试仪。力测试仪用于测量各个致动器在一系列设计参数范围内的力，包括挠曲长度、热臂宽度、臂分离和致动器厚度。力测试仪还连接到2到20个致动器的阵列上。已经测量了力测试仪偏转与致动器驱动功率。数据显示，单个致动器能够以小于15毫瓦的功率产生大于4.8微牛顿的力。测试还表明，耦合在一起的致动器成功地结合了单独的致动器的力。这些测量允许创建一组通用的设计规则，高效的热致动器。
Surface micromachined polycrystalline silicon thermal micro- actuators provide large deflections while requiring low drive voltages and occupying small device areas. The force provided by thermal actuators is not currently known. Therefore, force testers have been designed and fabricated. The force testers were used to measure the force of individual actuators over a range of design parameters including flexure length, hot arm width, arm separation,and actuator thickness. The force testers have also been connected to arrays of 2 to 20 actuators coupled together. Measurements of force tester deflection versus actuator drive power have been taken. The data shows that individual actuators are capable of generating greater than 4.8 micronewtons of force with less than 15 milliwatts of power. The test also show that coupling the actuators together successfully combines the force of individual actuators. These measurements allow the creation of a general set of design rules for efficient thermal actuators.