Ultra-High-Sensitive Detection Using Pulse-Heating of MEMS-Type Oxide Semiconductor Gas Sensor:(2) Detection of Ethanol in Ppb Level By Introducing Oxygen Supplier

Ultra-High-Sensitive Detection Using Pulse-Heating of MEMS-Type Oxide Semiconductor Gas Sensor:(2) Detection of Ethanol in Ppb Level By Introducing Oxygen Supplier
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利用MEMS型氧化物半导体气体传感器脉冲加热的超高灵敏度检测:(2)引入供氧源检测Ppb级乙醇

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发表时间:
2020
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通讯作者:
Ken Watanabe
Ken Watanabe
中科院分区:
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文献类型:
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作者:
Kengo Shimanoe;Yuki Hiroyama;Koichi Suematsu;Ken Watanabe

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