Study on Micro-ECM with Short Pulses
Study on Micro-ECM with Short Pulses
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短脉冲微ECM研究
DOI：
10.2526/jseme.40.29
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发表时间：
2006
期刊：
影响因子：
--
通讯作者：
T. Masuzawa
中科院分区：
文献类型：
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作者：
T. Abe;T. Masaki;T. Wada;T. Masuzawa
电化学加工（ECM）的优点是可以快速产生镜面表面，而不会对工件表面造成任何额外的损伤和应力。但在微形状加工中，其加工精度受到限制。在这项研究中，引入微秒级的短电流脉冲来实现选择性溶解，并通过实验研究了它们对加工精度的影响。各种电极材料之间的差异也在耐用性和加工精度、改变加工间隙和脉冲持续时间方面进行了测试。结果发现，钛是微ECM电极的合适材料。在20μs脉冲和5μm加工间隙的条件下，可以实现在不锈钢上加工5μm深、50/50μm线/间距的微图案。
Electrochemical machining (ECM) has the advantage that it can quickly produce mirrorlike surfaces without causing any additional damage and stress on the workpiece surface. However, it has a limit in machining accuracy in the machining of microshapes. In this study, short current pulses of microsecond order are introduced to achieve selective dissolution and their effectiveness on the precision of machining is experimentally investigated. The differences among various electrode materials are also tested in terms of durability and machining accuracy, changing machining gap and pulse duration. As a result, it was found that titanium is a suitable material for the electrode for micro-ECM. The condition of 20 μs pulses and a 5 μm machining gap could achieve the machining of 5-μm- deep micropatterns of 50/50 μm line/space into stainless steel.