MICRO FLUIDIC CHAMBER WITH THIN SI WINDOWS FOR OBSERVATION OF BIOLOGICAL SAMPLES IN VACUUM

MICRO FLUIDIC CHAMBER WITH THIN SI WINDOWS FOR OBSERVATION OF BIOLOGICAL SAMPLES IN VACUUM
复制标题

具有薄 SI 窗口的微流体室，用于真空观察生物样品

DOI：
10.1109/memsys.2015.7050959
复制
发表时间：
2015
期刊：
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems
影响因子：
--
通讯作者：
and Takahito Ono
and Takahito Ono
中科院分区：
--
文献类型：
--
作者：
Hideki Hayashi;Masaya Toda;and Takahito Ono

文献摘要

相似文献

研制了具有178 nm厚的单晶硅微通道窗口的微流体室。由于这些薄窗口，可以通过扫描电子显微镜观察到通道内的水生样品。在真空中可以探测到来自样品的二次电子，加速电压为15kV，发射电流为75μA。微流体室可能用于在真空中通过硅薄窗进行磁共振成像。
A micro fluidic chamber with 178 nm-thick single crystal Si windows on a micro channel has been developed. Because of these thin windows, the aquatic sample inside of the channel can be observed by scanning electron microscopy. Secondary electrons from a sample in the channel are able to be detected in vacuum with an acceleration voltage of 15 kV, where the emission current is 75 μA. The micro fluidic chamber is possibly applied to cell imaging via the Si thin window in vacuum using magnetic resonance force microscopy.