A high-speed capacitive humidity sensor with on-chip thermal reset
A high-speed capacitive humidity sensor with on-chip thermal reset
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DOI：
10.1109/16.830983
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发表时间：
2000-04-01
影响因子：
3.1
通讯作者：
Wise, KD
中科院分区：
文献类型：
--
作者：
Kang, US;Wise, KD
本文报道了一种集成在多晶硅加热器上的高速电容式湿度传感器。响应时间为1.0 s，灵敏度为30.0 fF/%RH。高速实现使用多个聚酰亚胺柱具有几微米的直径，并允许水分扩散到他们周围，使用结构，消除列之间的气隙电容，模拟传感器输出漂移只有1%时，在空气区域的相对介电常数从1到10的变化。多晶硅加热器用于测量>80%RH的相对湿度水平。使用该方法获得了+/-3%RH的精度，温度和相对湿度的测量误差分别为+/-0.5 ℃和+/-2%RH。该加热器还减少了润湿后的恢复时间，使传感器能够从污染和老化中恢复，并允许在自检协议期间按需重置传感膜。
This paper reports a high-speed capacitive humidity sensor integrated on a polysilicon heater. A response time of 1,0 s and a sensitivity of 30.0 fF/%RH have been obtained. High speed is achieved using multiple polyimide columns having diameters of a few microns and allowing moisture to diffuse into them circumferentially, Using structures that eliminate the air-gap capacitance between the columns, the simulated sensor output drifts by only 1% when the relative dielectric constant in the air region changes from 1 to 10. A polysilicon heater is used to measure relative humidity levels >80%RH. An accuracy of +/-3%RH has been obtained using this method, with measurement errors of +/-0,5 degrees C and +/-2%RH in temperature and relative humidity, respectively, The heater also reduces the recovery time after wetting, enables the sensor to recover from contamination and aging, and allows the sensing film to be reset on demand during self-test protocols.